现行 JB/T 4081-2011
真空技术 溅射离子泵 真空技术 溅射离子泵 Vacuum technology - Sputter-ion pumps
发布日期:2011-12-20
实施日期:2012-04-01
分类信息
研制信息

归口单位: 全国真空技术标准化技术委员会

起草单位: 北京中科科仪技术发展有限公司、 沈阳真空技术研究所

起草人: 朱国精、 邹蒙

标准简介

本标准规定了普通型式的溅射离子泵的型式与基本参数、要求、测量方法、检验规则、标志、包装、运输、贮存及质量保证要求。本标准适用于普通型式的溅射离子泵

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最后更新时间 2025-09-01