YS/T 1167-2016
硅单晶腐蚀片
Monocrystalline silicon etched wafers
2016-07-11
GB/T 26069-2022
硅单晶退火片
Annealed monocrystalline silicon wafers
2022-03-09
GB/T 12964-2018
硅单晶抛光片
Monocrystalline silicon polished wafers
2018-09-17
GB/T 26065-2010
硅单晶抛光试验片规范
Specification for polished test silicon wafers
2011-01-10
T/CNIA 0290-2025
光伏用半片硅单晶片
2025-02-24
YB 1603-1983
硅单晶切割片和研磨片
1983-08-18
GB/T 29506-2013
300mm 硅单晶抛光片
300mm polished monocrystalline silicon wafers
2013-05-09
GB/T 12965-2018
硅单晶切割片和研磨片
Monocrystalline silicon as cut wafers and lapped wafers
2018-09-17
GB/T 30656-2023
碳化硅单晶抛光片
Polished monocrystalline silicon carbide wafers
2023-03-17
GB/T 29508-2013
300mm 硅单晶切割片和磨削片
300mm monocrystalline silicon as cut slices and grinded slices
2013-05-09
T/NXCL 29-2024
300 mm低氧含量直拉硅单晶抛光片
2024-02-06
T/NXCL 017-2022
300 mm重掺磷直拉硅单晶抛光片
2022-12-02
T/NXCL 016-2022
200 mm重掺锑直拉硅单晶抛光片
2022-12-02
T/ZZB 0648-2018
200 mm重掺磷直拉硅单晶抛光片
2018-10-19
T/IAWBS 005-2024
6~8英寸碳化硅单晶抛光片
2024-01-12
GB/T 31351-2014
碳化硅单晶抛光片微管密度无损检测方法
Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers
2014-12-31
T/IAWBS 014-2021
碳化硅单晶抛光片位错密度的测试方法
2021-09-15
GB/T 41325-2022
集成电路用低密度晶体原生凹坑硅单晶抛光片
Low density crystal originated pit polished monocrystalline silicon wafers for integrated circuit
2022-03-09
SJ/T 11504-2015
碳化硅单晶抛光片表面质量的测试方法
Test method for measuring surface quality of polished monocrystalline silicon carbide
2015-04-30
T/ICMTIA SM0027-2022
先进存储工艺用300mm p-型硅单晶抛光片
2022-05-10