碳化硅单晶抛光片表面粗糙度的测试方法
Test methods for measuring surface roughness of polished monocrystalline silicon carbide wafers
2015-04-30
GB/T 31351-2014
碳化硅单晶抛光片微管密度无损检测方法
Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers
2014-12-31
GB/T 32278-2015
碳化硅单晶片平整度测试方法
Test methods for flatness of monocrystalline silicon carbide wafers
2015-12-10
GB/T 30866-2014
碳化硅单晶片直径测试方法
Test method for measuring diameter of monocrystalline silicon carbide wafers
2014-07-24
SJ 21122-2016
PVTSiC76SI1-BP01型碳化硅单晶抛光片规范
Specification for polished mono-crystalline silicon carbide wafers of PVTSiC76SI1-BP01
2016-01-19
SJ 21441-2018
SiC-HPSI型高纯半绝缘碳化硅单晶片规范
Specification for high purity semi-insulating silicon carbide monocrystalline wafers of SiC-HPSI
2018-01-18
SJ/T 11504-2015
碳化硅单晶抛光片表面质量的测试方法
Test method for measuring surface quality of polished monocrystalline silicon carbide
2015-04-30
GB/T 41325-2022
集成电路用低密度晶体原生凹坑硅单晶抛光片
Low density crystal originated pit polished monocrystalline silicon wafers for integrated circuit
2022-03-09
GB/T 26065-2010
硅单晶抛光试验片规范
Specification for polished test silicon wafers
2011-01-10
GB/T 30867-2014
碳化硅单晶片厚度和总厚度变化测试方法
Test method for measuring thickness and total thickness variation of monocrystalline silicon carbide wafers
2014-07-24
GB/T 30868-2014
碳化硅单晶片微管密度的测定 化学腐蚀法
Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching
2014-07-24
GB/T 43313-2023
碳化硅抛光片表面质量和微管密度的测试 共焦点微分干涉法
Test method for surface quality and micropipe density of polished silicon carbide wafers—Confocal and differential interferometry optics
2023-11-27
DL/T 2310-2021
电力系统高压功率器件用碳化硅外延片使用条件
Acceptance specification for silicon carbide epitaxial wafer of high voltage power devices in the grid system