半绝缘砷化镓单晶中碳浓度的红外吸收测试方法
Test method for carbon acceptor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy
2015-12-10
GB/T 17170-2015
半绝缘砷化镓单晶深施主EL2浓度红外吸收测试方法
Test method for the EL2 deep donor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy
2015-12-10
DIN 50449-1
Testing of materials for semiconductor technology - Determination of impurity content in semiconductors by infrared absorption - Part 1: Carbon in gallium arsenide
半导体技术材料的试验.用红外吸收法测定半导体中的杂质含量.第1部分:砷化镓中的碳