硅衬底上绝缘体薄膜厚度及折射率的椭圆偏振测试方法
Test method for measurement of insulator thickness and refractive index on silicon substrates by ellipsometry
2012-11-07
SJ/T 11498-2015
重掺硅衬底中氧浓度的二次离子质谱测量方法
Test method for measuring oxygen contamination in heavily doped silicon substrates by secondary ion mass spectrometry
2015-04-30
GB/T 24580-2009
重掺n型硅衬底中硼沾污的二次离子质谱检测方法
Test method for measuring boron contamination in heavily doped n-type silicon substrates by secondary ion mass spectrometry
2009-10-30
GB/T 24575-2009
硅和外延片表面Na、Al、K和Fe的二次离子质谱检测方法
Test method for measuring surface sodium,aluminum,potassium,and iron on silicon and epi substrates by secondary ion mass spectrometry