短基线红外吸收光谱法测量硅中间隙氧含量短基线红外吸收光谱法测量硅中间隙氧含量Test methods for measurement of interstitial oxygen content in silicon by short baseline infrared absorption spectrometry
硅晶体中间隙氧含量的红外吸收测量方法
Test method for determining interstitial oxygen content in silicon by infrared absorption
2018-09-17
GB/T 14144-2009
硅晶体中间隙氧含量径向变化测量方法
Testing method for determination of radial interstitial oxygen variation in silicon
2009-10-30
SJ/T 11552-2015
以布鲁斯特角入设P偏振辐射红外吸收光谱法测量硅中间隙氧含量
Test methods for measurement of interstitial oxygen content of silicon wafers by infrared absorption with P-polarized radiation incident at the Brewster angle
2015-10-10
GB/T 34520.8-2021
连续碳化硅纤维测试方法 第8部分:氧含量
Test methods of continuous silicon carbide fibers—Part 8：Oxygen content
2021-08-20
SJ 20636-1997
IC用大直径薄硅片的氧、碳含量微区试验方法
Test method for oxygen and carbon contents of large diameter thin silicon wafer in microzone for use in IC
1997-06-17
SJ/T 11498-2015
重掺硅衬底中氧浓度的二次离子质谱测量方法
Test method for measuring oxygen contamination in heavily doped silicon substrates by secondary ion mass spectrometry
2015-04-30
GB/T 32281-2015
太阳能级硅片和硅料中氧、碳、硼和磷量的测定 二次离子质谱法
Test method for measuring oxygen, carbon, boron and phosphorus in solar silicon wafers and feedstock by secondary ion mass spectrometry
2015-12-10
GB/T 24582-2023
多晶硅表面金属杂质含量测定 酸浸取-电感耦合等离子体质谱法
Test method for measuring surface metal impurity content of polycrystalline silicon—Acid extraction-inductively coupled plasma mass spectrometry method
2023-08-06
GB/T 31854-2015
光伏电池用硅材料中金属杂质含量的电感耦合等离子体质谱测量方法
Test method for measuring metallic impurities content in silicon materials used for photovoltaic applications by inductively coupled plasma mass spectrometry