现行 SJ 21127-2016
化学机械抛光机通用规范 化学机械抛光机通用规范 General specification for chemical mechanical polishing equipment
发布日期:2016-01-19
实施日期:2016-03-01
分类信息
标准简介

本规范规定了化学机械抛光机(以下简称设备)的通用要求、质量保证规定、交货准备和说明事项。本规范适用于微组装薄膜工艺和硅晶圆的抛光工艺中的化学机械抛光机的设计、生产、检验、验收和订购,其他微组装制造工艺设备或其他行业的类似设备也可参照执行

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最后更新时间 2025-09-02