GB/T 26111-2023
微机电系统（MEMS）技术 术语
Micro-electromechanical system technology—Terms
2023-05-23
GB/T 42597-2023
微机电系统（MEMS）技术 陀螺仪
Micro-electromechanical systems technology—Gyroscopes
2023-05-23
GB/T 26113-2010
Micro electromechanical system technology—General rules for the assessment of microgeometrical parameters
GB/T 26113-2010
微机电系统（MEMS）技术 微几何量评定总则
Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters
2011-01-10
GB/T 26112-2010
微机电系统（MEMS）技术 微机械量评定总则
Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters
2011-01-10
BS EN 62047-11-2013
Semiconductor devices. Micro-electromechanical devices-Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
半导体器件 微机电设备
2013-10-31
GB/T 44839-2024
微机电系统（MEMS）技术 MEMS材料微柱压缩试验方法
Micro-electromechanical systems (MEMS) technology一Micro-pillar compression test for MEMS materials
2024-10-26
GB/T 42158-2023
微机电系统（MEMS）技术 微沟槽和棱锥式针结构的描述和测量方法
Micro-electromechanical systems technology（MEMS） —Description and measurement methods for micro trench and pyramidal needle structures
2023-03-17
IEC 62047-11-2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
半导体器件 - 微机电器件 - 第11部分:用于微机电系统的自由立体材料的线性热膨胀系数的测试方法
2013-07-17
GB/T 38341-2019
微机电系统(MEMS)技术 MEMS器件的可靠性综合环境试验方法
Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments
2019-12-31
GB/T 44529-2024
微机电系统（MEMS）技术 射频MEMS环行器和隔离器
Micro-electromechanical systems（MEMS）technology—Radio frequency MEMS circulators and isolators
2024-09-29
GB/T 44842-2024
微机电系统（MEMS）技术 薄膜材料的弯曲试验方法
Micro-electromechanical systems （MEMS） technology—Bend testing methods of thin film materials
2024-10-26
GB/T 38447-2020
微机电系统（MEMS）技术 MEMS结构共振疲劳试验方法
Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration
2020-03-06
GB/T 34898-2017
微机电系统（MEMS）技术 MEMS谐振敏感元件非线性振动测试方法
Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive element
2017-11-01
GB/T 38446-2020
微机电系统（MEMS）技术 带状薄膜抗拉性能的试验方法
Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films
2020-03-06
GB/T 44849-2024
微机电系统（MEMS）技术 金属膜材料成形极限测量方法
Micro-electromechanical systems (MEMS) technology—Forming limit measuring method of metallic film materials
2024-10-26
GB/T 34899-2017
微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法
Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy
2017-11-01
GB/T 42896-2023
微机电系统（MEMS）技术 硅基MEMS纳尺度结构冲击试验方法
Micro-electromechanical systems（MEMS） technology—Impact test method for nanostructures of silicon based MEMS
2023-08-06
IEC 60050-523-2018/AMD1-2019
Amendment 1 - International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical systems (MEMS)
修改件1.国际电工词汇（IEV）.第523部分:微机电系统（MEMS）
2019-10-17
GB/T 44919-2024
微机电系统（MEMS）技术 薄膜力学性能的鼓胀试验方法
Micro-electromechanical systems （MEMS）technology—Bulge test method for measuring mechanical properties of thin films
2024-11-28