扫描探针显微镜校准规范
Calibration specification for scanning probe microscope
2012-06-18
ASTM E766-14(2019)
Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
校准扫描电子显微镜的放大倍数的标准实施规程
2019-11-01
GA/T 1418-2017
法庭科学玻璃物证的元素成分检验 扫描电镜/能谱法
Analysis of elements in glass evidence in Forensics—Scanning electron microscope/energy dispersive X-ray spectrometry(SEM/EDX)
2017-09-18
GOST R 8.636-2007
Государственная система обеспечения единства измерений. Микроскопы электронные растровые. Методика калибровки
国家制度确保衡量标准的统一性 扫描电子显微镜 校准方法
GA/T 823.3-2018
法庭科学油漆物证的检验方法 第3部分：扫描电子显微镜/X射线能谱法
Examination methods for paint evidence in Forensics—Part 3:Scanning electron microscope/energy dispersive X-ray analysis(SEM/EDX)
2018-06-25
BS ISO 15632-2021
Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
微束分析 用于扫描电子显微镜（SEM）或电子探针微分析仪（EPMA）的能量色散X射线光谱仪（EDS）规范和检查的选定仪器性能参数
2021-02-22
KS D ISO 15632
마이크로빔 분석 — 주사전자현미경(SEM) 또는 전자 탐침 미소분석기(EPMA)에서 사용하는 에너지 분산 엑스선 분광기(EDS)의 사양과 점검을 위해 선택한 기기 성능 파라미터
微束分析.与扫描电子显微镜（SEM）或电子探针微量分析仪（EPMA）一起使用的能量色散X射线光谱仪（EDS）的规范和检查所选仪器性能参数
2023-11-20
ISO 15632-2021
Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
微束分析.与扫描电子显微镜（SEM）或电子探针显微分析仪（EPMA）一起使用的能量色散X射线光谱仪（EDS）规范和检查用选定仪器性能参数
2021-02-12
BS CECC 00013-1985
Harmonized system of quality assessment for electronic components: basic specification: scanning electron microscope inspection of semiconductor dice
电子元件质量评定协调体系:基本规范:半导体芯片的扫描电子显微镜检查