确定冲击与振动测量用机电换能器特性的方法确定冲击与振动测量用机电换能器特性的方法Methods for specifying the characteristics of electro-mechanical transducers for shock and vibration measurements
Semiconductor devices. Micro-electromechanical devices-Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
半导体器件 微机电设备
2017-10-09
GB/T 44515-2024
微机电系统（MEMS）技术 MEMS压电薄膜机电转换特性测量方法
Micro-electromechanical systems (MEMS) technology—Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
2024-09-29
IEC 62047-42-2022
Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
半导体器件.微机电器件.第42部分:压电MEMS悬臂梁的机电转换特性的测量方法
2022-09-16
IEC 62047-30-2017
Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
半导体器件 - 微机电器件 - 第30部分:MEMS压电薄膜机电转换特性的测量方法
2017-09-15
IEC 62047-35-2019
Semiconductor devices – Micro-electromechanical devices - Part 35: Test method of electrical characteristics under bending deformation for flexible electro-mechanical devices
半导体器件.微机电装置.第35部分:挠性机电装置弯曲变形电特性的试验方法
2019-11-22
DIN EN 62047-30-DRAFT
Draft Document - Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film (IEC 47F/241/CD:2016)
文件草稿-半导体器件-微机电器件-第30部分:MEMS压电薄膜机电转换特性的测量方法（IEC 47F/241/CD:2016）