硅材料用高纯石墨制品中杂质含量的测定 电感耦合等离子体发射光谱法
Determination of multi-element contents in high purity graphite used for silicon material-Inductively coupled plasma atomic emission spectrographic method
2017-04-12
YS/T 1164-2016
硅材料用高纯石英制品中杂质含量的测定 电感耦合等离子体发射光谱法
Test method for the content of impurities in high purity quartz used for silicon material—Inductively coupled plasma atomic emission spectrometry method