CK-100￣600超高真空金属油扩散泵技术条件
Ultrahigh vacuum metal pump for oil diffusion(CK-100~600)--Performance specification
1981-03-27
DIN 28427
Vacuum technology; acceptance specifications for diffusions pumps and vapour jet vacuum pumps for vapour pressures of the pump fluid <1 mbar
真空技术；泵流体蒸汽压力<1 mbar的扩散泵和蒸汽喷射真空泵验收规范