GB/T 42789-2023
硅片表面光泽度的测试方法
GB/T 19921-2018
硅抛光片表面颗粒测试方法
Test method for particles on polished silicon wafer surfaces
2018-12-28
GB/T 6624-2009
硅抛光片表面质量目测检验方法
Standard method for measuring the surface quality of polished silicon slices by visual inspection
2009-10-30
GB/T 4058-2009
硅抛光片氧化诱生缺陷的检验方法
Test method for detection of oxidation induced defects in polished silicon wafers
2009-10-30
SJ/T 11504-2015
碳化硅单晶抛光片表面质量的测试方法
Test method for measuring surface quality of polished monocrystalline silicon carbide
2015-04-30
SJ/T 11503-2015
碳化硅单晶抛光片表面粗糙度的测试方法
Test methods for measuring surface roughness of polished monocrystalline silicon carbide wafers
2015-04-30
T/IAWBS 010-2019
碳化硅单晶抛光片表面质量和微管密度检测方法-激光散射检测法
2019-12-27
T/IAWBS 012-2019
碳化硅单晶抛光片表面质量和微管密度测试方法 ——共焦点微分干涉光学法
2019-12-27