现行 SJ/T 10315-1992
四探针探头通用技术条件 四探针探头通用技术条件 Generic specification of four-point probe
发布日期:1992-06-15
实施日期:1992-12-01
分类信息
研制信息

起草单位: 国营建中机器厂、 中国计量科学研究院

起草人: 张建勇、 查名瑞、 李达汉、 刘学俭、 鲁效明、 耿玉梅

标准简介

本标准规定了四探针探头的术语、技术要求、测试方法、检验规则、标志、包装、运输、贮存要求等。 本标准适用于电子和冶金等行业所使用的四探针法测试半导体棒、片、薄层以及金属薄层的电阻率、薄层电阻和电阻的探头。 本标准与3J/T 10314《直流四探针电阻率测试仪通用技术条件》标准配套使用

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最后更新时间 2025-08-29