现行 SJ/T 10312-1992
电子束暴光机通用技术条件 电子束暴光机通用技术条件 General specification of electron beam exposure system
发布日期:1992-06-15
实施日期:1992-12-01
分类信息
研制信息

起草单位: 机械电子工业部第48研究所

起草人: 张俊国

标准简介

本标准规定了电子束曝光机的术语、技术要求、试验方法、检验规则等。 本标准适用于集成电路、微波器件、光电器件、声表面波器件等微细图形制作的电子束曝光机

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电子束暴光

最后更新时间 2025-08-29