工作用热传导真空计校准规范
Calibration Specification for Industrial Thermal Conductivity Vacuum Gauges
2023-06-30
DIN 28418-3
Vacuum technology; standard method for vacuum gauge calibration by direct comparison with a reference vacuum gauge, thermal conductivity gauges
真空技术;通过与参考真空计、热导率计直接比较进行真空计校准的标准方法