现行 SJ 2065-1982
半导体器件生产用扩散炉测试方法 半导体器件生产用扩散炉测试方法 Testing method for diffusion furnace for semiconductor device manufacturing
发布日期:1982-02-18
实施日期:1982-07-01
分类信息
标准简介

本标准适用于SJ 1794-81《半导体器件生产用扩散炉通用技术条件》中规定的各种类型扩散炉

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最后更新时间 2025-08-27