QJ 1079A-2004
陀螺仪主要精度指标和测试方法
Major precision parameters and testing methods for gyroscopes
2004-09-01
SJ 21264-2018
MEMS加速度传感器测试方法
Test methods for MEMS acceleration transducer
2018-01-18
QJ 1458A-2004
气浮陀螺平台测试方法
Test method of platform based air-suspension gyroscope
2004-09-01
GB/T 42896-2023
微机电系统（MEMS）技术 硅基MEMS纳尺度结构冲击试验方法
Micro-electromechanical systems（MEMS） technology—Impact test method for nanostructures of silicon based MEMS
2023-08-06
GB/T 42895-2023
微机电系统（MEMS）技术 硅基MEMS微结构弯曲强度试验方法
Micro-electromechanical systems（MEMS）technology—Bending strength test method for microstructures of silicon based MEMS
2023-08-06
GB/T 33929-2017
MEMS高g值加速度传感器性能试验方法
Test methods of the performance for MEMS high g accelerometer
2017-07-12
GB/T 44513-2024
微机电系统（MEMS）技术 传感器用MEMS压电薄膜的环境试验方法
Micro-electromechanical systems (MEMS) technology—Environmental test methods of MEMS piezoelectric thin films for sensor application
2024-09-29
GB/T 42897-2023
微机电系统（MEMS）技术 硅基MEMS纳米厚度膜抗拉强度试验方法
Micro-electromechanical systems（MEMS） technology—Tensile strength test method for nano-scale membranes of silicon based MEMS
2023-08-06
GB/T 42191-2023
MEMS压阻式压力敏感器件性能试验方法
Test methods of the performances for MEMS piezoresistive pressure-sensitive device
2023-05-23
GB/T 44514-2024
微机电系统（MEMS）技术 层状MEMS材料界面黏附能四点弯曲试验方法
Micro-electromechanical systems (MEMS) technology—Four-point bending test method for interfacial adhesion energy of layered MEMS materials
2024-09-29
GB/T 44517-2024
微机电系统（MEMS）技术 MEMS膜残余应力的晶圆曲率和悬臂梁挠度试验方法
Micro-electromechanical systems (MEMS) technology—Wafer curvature and cantilever beam deflection test methods for determining residual stresses of MEMS films
2024-09-29
GB/T 38341-2019
微机电系统(MEMS)技术 MEMS器件的可靠性综合环境试验方法
Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments
2019-12-31
GB/T 33922-2017
MEMS压阻式压力敏感芯片性能的圆片级试验方法
Wafer level test methods for MEMS piezoresistive pressure-sensitive die performances
2017-07-12
BS IEC 62047-32-2019
Semiconductor devices. Micro-electromechanical devices-Test method for the nonlinear vibration of MEMS resonators
半导体器件 微机电设备
2019-01-29
GB/T 44842-2024
微机电系统（MEMS）技术 薄膜材料的弯曲试验方法
Micro-electromechanical systems （MEMS） technology—Bend testing methods of thin film materials
2024-10-26
GB/T 38447-2020
微机电系统（MEMS）技术 MEMS结构共振疲劳试验方法
Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration
2020-03-06
GB/T 34898-2017
微机电系统（MEMS）技术 MEMS谐振敏感元件非线性振动测试方法
Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive element
2017-11-01
BS IEC 62047-34-2019
Semiconductor devices. Micro-electromechanical devices-Test methods for MEMS piezoresistive pressure-sensitive device on wafer
半导体器件 微机电设备
2019-04-16
BS EN 62047-21-2014
Semiconductor devices. Micro-electromechanical devices-Test method for Poisson's ratio of thin film MEMS materials
半导体器件 微机电设备
2014-10-31
GB/T 44919-2024
微机电系统（MEMS）技术 薄膜力学性能的鼓胀试验方法
Micro-electromechanical systems （MEMS）technology—Bulge test method for measuring mechanical properties of thin films
2024-11-28