砷化镓外延层厚度红外干涉测量方法
Measuring thickness of epitaxial layers of gallium arsenide by infrared interference
2006-07-18
ASTM D8331/D8331M-25
Standard Test Method for Measurement of Film Thickness of Thin-Film Coatings by Non-Destructive Means Using Ruggedized Optical Interference
用加固光学干涉法用非破坏性方法测量薄膜涂层厚度的标准试验方法