异质外延层和硅多晶层厚度的测量方法
Test method for thickness of heteroepitaxy layers and polycrystalline layers
2015-04-30
GB/T 14847-2010
重掺杂衬底上轻掺杂硅外延层厚度的红外反射测量方法
Test mothod for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates by infrared reflectance