硅外延层电阻率测试方法(电容-电压法)(暂行)硅外延层电阻率测试方法(电容-电压法)(暂行)Method of measurement for resistivity of silicon epitaxial layer (capacitance-voltage method) (Provisional)
硅外延层、扩散层和离子注入层薄层电阻的测定 直排四探针法
Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array